Szilágyi Edit

• E-mail: szilagyi.edit@wigner.hu
• Phone: +36 1 392 2222 ext.: 3962
• Fax: +36 1 395 9151

Publications

Recent work of E. Szilágyi includes nuclear analysis using MeV energy ion beams (RBS - Rutherford Backscattering Spectrometry, ERDA - Elastic Recoil Detection Analysis, NRA - Nuclear Reaction Analysis, channeling). She developed a computer code to calculate the depth resolution of the above ion beam techniques.

She has been extensively dealing with ion implantation and with fundamental processes of ion implantation in porous silicon, metals and semiconductors. Her main scientific interests are thin films and multilayers.

She took part in the studies on the oxidation mechanisms of silicon carbide investigated by isotope tracing method.

CV

EDUCATION, DEGREES AND POSITIONS

2011- scientific advisor at MTA KFKI Research Institute for Particle and Nuclear Physics 2011 Doctor of the Hungarian Academy of Sciences 2000-2003 Bolyai János Fellowship, Hungarian Academy of Sciences 1994-2001 senior research fellow, MTA KFKI Research Institute for Particle and Nuclear Physics 1994 Candidate of Physics, Hungarian Academy of Sciences (equvivalent degree to Ph.D.) 1992-1994 research fellow, MTA KFKI Research Institute for Particle and Nuclear Physics 1990-1991 post doctoral fellowship, University Paris VII/VI. 1990 Doctor Univ., Lajos Kossuth University, Debrecen, Hungary 1987-1992 postgraduate fellowship, MTA KFKI Research Institute for Particle and Nuclear Physics 1982-1987 Lajos Kossuth University, Debrecen, Hungary

ROLE IN SCIENTIFIC COMMUNITY

2011- MTA KFKI Research Institute for Particle and Nuclear Physics, Scientific Council, member 2008- Hungarian Ion-beam Physics Platform, Steering Committee, member 2007- International Committee of the Conference series of Ion Beam Analysis, member 1999-2002 International Organising Committee of EPS-12, General Conference of the European Physical Society, Budapest, 26-30 August 2002, Secretary 1993- Editor of Ion Beam Information System 1993- Böhmische Physical Society, member 1992-1993 Organising Committee of IBA-11 (11th Int. Conf. on Ion Beam Analysis, 5-9 July, 1993, Balatonfüred), member

Research

The subject of my activities may be divided in two categories:

In the field of IBA methodology:

• measuring missing non-Rutherford cross sections for ERDA using 4He beam;
• predicting the energy and depth resolution of the various IBA methods with reasonable precision;
• treating the case of overlapping peaks that arise from particles of different type in complex NRA energy spectra;
• widening the range of present computer programs used in data reduction, especially by taking into account the effects of angular multiple scattering of the probing beam particles;
• including energy spread effects in spectrum simulation.

In the field of solid state physics and material science:

• studying heterogeneous materials, e.g., porous silicon, multilayers, etc.
• Applying IBA to these problems taking into account the special effects showing up in porous media.
• Studying the effects of ion implantation in porous silicon: structural changes and physical properties.
• Modification of the properties of the surface by ion implantation, fundamental processes of ion implantation.
• Magnetic structure and phase analysis in thin films by Synchrotron Mössbauer Reflectometry (SMR). Oxidation mechanism and kinetics of SiC.