Speaker: Aranka Derzsi (Wigner RCP)
Title: Electron power absorption mode transitions in low-pressure capacitively coupled plasmas
Date: Tuesday 28 April, 10:00
Place: Building 1, Conference room
Abstract:
Electron power absorption mode transitions in low-pressure capacitively coupled plasmas
Low-pressure capacitively coupled radio frequency discharges are widely used tools for plasma-based material processing, with applications ranging from deposition and etching in semiconductor manufacturing to surface treatment in biomedicine. In such systems, electron power absorption governs plasma generation and sustainment, determines key discharge properties, and plays a central role in the optimisation and control of plasma processes.
In this presentation, electron power absorption and ionization dynamics in low-pressure capacitively coupled plasmas are discussed in various gases and gas mixtures using a combination of particle-based computational studies and experimental measurements. The effects of varying gas composition, pressure, driving frequency, and surface processes on discharge characteristics are analyzed, focusing on electron power absorption mechanisms and transitions between different discharge operation modes.
