The heavy-ion cascade implanter is also a homemade equipment. The first implantation was performed in 1984.
In 1997 the implanter was connected to the Van de Graaff accelerator.
In 2003 new ion source was installed.
In 2012 the M-88 spectroscopic ellipsometer (J.A. Woollam Co. Inc.) with rotating analyzer was mounted on the chamber of Heavy Ion Cascade Implanter