Előadó: Vass Máté
Előadás címe: How do electrons absorb energy in radio frequency plasmas?
Dátum: 2022. január 11., 10 óra
Helyszín: 1-es épület Tanácsterem, illetve online: https://wigner-hu.zoom.us/j/97209260653?pwd=OWtVdVEwaXFqS2xaTmdLaUVGMjd… Meeting ID: 972 0926 0653 Passcode: 854105
Low-pressure radio-frequency discharges are important tools for various industrial and biological applications. Understanding the underlying physical mechanisms in these discharges would be highly desirable in order to achieve better control and process optimization. One of the most important questions is how charged particles, especially electrons gain and lose energy (a process called electron power absorption) by interacting with the RF electric field and the particles of the background gas in the discharge. In this talk, an overview of the existing theoretical models for electron power absorption in low-pressure RF discharges is given, and a computationally assisted, self-consistent description of electron power absorption, based on the momentum balance equation for the electrons, is presented.